1)  Ti-Si-N nano films
					
	
					
				
				
	
					
				Ti-Si-N纳米薄膜
			
					2)  Ti-Si-N nanocomposite film
					
	
					
				
				
	
					
				Ti-Si-N纳米晶复合薄膜
			
					3)  Ti Si N nanocomposite films
					
	
					
				
				
	
					
				Ti-Si-N纳米复合薄膜
			
					4)  Ta-Si-N nanoscale thin-film
					
	
					
				
				
	
					
				Ta-Si-N纳米薄膜
			
					5)  Ti-Si-N films
					
	
					
				
				
	
					
				Ti-Si-N薄膜
				1.
					The influence of bombardment energy on the growth and mechanical property is investigated,and the influence of bombardment energy on the growth mechanism of Ti-Si-N films is discussed.
						
						试验结果表明:当轰击能量为700eV时,Ti-Si-N薄膜晶粒直径达到了最小值11nm,此时Ti-Si-N薄膜的硬度相对最高,为33GPa。
					
					6)  Ti-Si-N nanocomposite thin film
					
	
					
				
				
	
					
				Ti-Si-N纳米混合膜
	补充资料:维纳斯(米洛斯)(Weinɑsi
		      见阿佛洛狄忒(米洛斯)。
         
		
		说明:补充资料仅用于学习参考,请勿用于其它任何用途。
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