1) optical stylus
光触针
2) laser probe measurement
光触针测量
1.
The shaped annular beam confocal measurement method for sharpening the main lobe of Airy spot is used to improve the lateral resolution of a laser probe measurement system(LPMS),and the heterodyne confocal measurement method is used to improve the axial resolution of LPMS, thereby the spatial resolution of LPMS is improved.
该方法为光触针测量系统空间分辨力的提高提供了1种新的方法,可广泛应用于超精密三维微细结构工件的超精密测量。
4) cat whisker
触须，针电极，触针
5) contact pin
触针，触片，接触柱
6) stylus instrument
触针法
补充资料：触触生
1.北周熊安生避大官讳的阿谀自称。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条