1) SiO 2-on-Si
Si基SiO2
1.
GHz AWG based interleaver is designed and f abricated based on SiO 2-on-Si optical planar waveguides.
以Si基SiO2 平面光波导为基础,设计并制备了50/100GHz AWG型光学梳状滤波器。
2) silica optical waveguide on silicon
Si基SiO2波导
3) TiNi/Ti/SiO2/Si substrate
TiN/Ti/SiO2/Si基板
4) silicon-based SiO2 optical waveguide
Si基SiO2光波导
5) SiO_2/Si
SiO2/Si
1.
The stress distribution of a SiO_2/Si waveguide during different sintering step is analyzed theoretically using the finite element method.
采用有限元法对SiO2/Si掩埋光波导制备工艺中的应力变化进行了系统的分析,在此基础上,应用有限差分束传播法(FDBPM)对应力光波导的双折射进行了计算。
6) SiO2/Si and Si3N4/Si
SiO2/Si和Si3N4/Si
补充资料：氮化硅(si_(3)N_(2))基陶瓷制品
氮化硅(si_(3)N_(2))基陶瓷制品
氟化硅(s11N z)基陶瓷制品中国科学院上海硅酸盐研究所供稿
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条