1)  focused grid
					
	
					
				
				
	
					
				聚光(X射线)滤线栅
			
					2)  X-ray grating
					
	
					
				
				
	
					
				X射线光栅
				1.
					The diffraction performance of X-ray grating based on the Fresnel diffraction theory is presented in the case of polychromatic source.
						
						基于Fresnel衍射理论,分析了复色光源X射线光栅衍射效率。
					
					3)  X-ray transmission gratings
					
	
					
				
				
	
					
				X射线透射光栅
				1.
					For fabricating X-ray mask of high line-density X-ray transmission gratings,the field stitching of E-beam lithography was analyzed when patterning high line-density gratings;by using pattern correction and low sensitive 950 k PMMA resist,the proximity effect of electron beam was effectively depressed when exposing thick resist spun on polyimide membrane.
						
						为了制备高线密度X射线透射光栅掩模,分析了电子束光刻中场拼接对高线密度光栅图形的影响;利用几何校正技术和低灵敏度的950 k的PMMA电子束抗蚀剂,克服了电子束的邻近效应对厚胶图形曝光的影响。
					2.
					The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-ray lithography was reported.
						
						针对X射线透射光栅摄谱仪中的高线密度光栅,研究了采用电子束曝光和X射线曝光技术结合制作高线密度X射线透射光栅的工艺技术。
					
					4)  X-ray transmission grating
					
	
					
				
				
	
					
				X射线透射光栅
				1.
					Fabrication of high-aspect-ratio and high-density X-ray transmission grating
					
					
						
						
					
						大高宽比、高线密度X射线透射光栅的制作
					2.
					Using the same fabrication processes,the X-ray transmission grating,which has the line density of 3333 1/mm and the thickness of 1000 nm,has been fabricated.
						
						本文针对X射线成像波带片和光栅在X射线显微成像技术中的应用,把电子束光刻和X射线光刻技术相结合,在深入研究电子束光刻和X射线光刻工艺技术的基础之上,成功制作了最外环宽度为100 nm,厚度为700 nm和1300 nm的大高宽比X射线成像波带片,制作了线密度为3333 l/mm,厚度为1000 nm的大高宽比、高线密度X射线透射光栅。
					
					5)  parallel grid
					
	
					
				
				
	
					
				平行(X射线)滤线栅
			
					6)  Soft X-ray transmission grating
					
	
					
				
				
	
					
				软X射线透射光栅
	补充资料:凹面光栅
		分子式:
CAS号:
性质:又称罗兰光栅(Rolland grating)。它的作用是使光既衍射又聚焦。因而凹面光栅摄谱仪只需光栅、狭缝及感光板三部分。它可减少吸收现象,只存在光栅面一次反射的光损失,且无色差。可用于远紫外及远红外光谱区域。
		
		CAS号:
性质:又称罗兰光栅(Rolland grating)。它的作用是使光既衍射又聚焦。因而凹面光栅摄谱仪只需光栅、狭缝及感光板三部分。它可减少吸收现象,只存在光栅面一次反射的光损失,且无色差。可用于远紫外及远红外光谱区域。
说明:补充资料仅用于学习参考,请勿用于其它任何用途。
	参考词条