1) LIGA/UV-LIGA Technology
LIGA/UV-LIGA技术
2) UV-LIGA
UV-LIGA技术
1.
Prime study of an electromagnetic microrelay fabricated by UV-LIGA technology;
UV-LIGA技术制造微型电磁继电器的初步研究
2.
The bi-layer micro gears have been fabricated by UV-LIGA technique using SU-8 photoresist.
利用SU-8光刻胶UV-LIGA技术制备了双层微齿轮,齿轮单层的厚度可达450μm。
3.
Process parameters of SU-8 photoresist based UV-LIGA technique were optimized.
对基于SU-8胶的UV-LIGA技术进行了工艺优化,研究了光源波长和曝光时间对SU-8胶成型的影响。
3) UV-LIGA technology
UV-LIGA技术
1.
A bistable electromagnetic RF MEMS switch based on UV-LIGA technology was described.
介绍了一种基于UV-LIGA加工技术的双稳态电磁型RF MEMS开关,该结构由于使用了永磁体单元而使得开关在维持“开”或“关”态时不需要功耗,利用牺牲层UV-LIGA技术实现了开关的微制作。
5) LIGA technology
LIGA技术
1.
Being the key of LIGA /quasi-LIGA technology,microelectroforming process has wide applications in all kinds of MEMS fields.
微电铸是相对于常规电铸工艺而确立的新概念,它是适用于微小结构成型而建立的批量加工技术,既可以看作是在微细加工模具基础上的传统电铸技术的延伸,也可以认为是掩膜电镀在高深宽比方向发展的结果,微电铸工艺是LIGA/准LIGA技术的核心内容,在MEMS技术领域有广泛应用。
2.
Emphasis is given to indicate that LIGA technology as a typical lithography will play a very important role in the future development of micromold manufacture technology.
介绍了微型制件及微型模具成形特点 ,全面分析了各种微细加工方法的技术特点及其在微型模具制造中的应用状况 ,同时分析了各种微细加工技术的适用范围与发展前景 ,并重点阐述了以LIGA技术为代表的光加工技术在未来微型模具制造技术发展中的重要作
6) LIGA
LIGA技术
1.
Optimal process of micro-EDM based on LIGA technique;
基于LIGA技术的微细电火花加工优化研究
2.
ComPuter Aided Graphical Design of X Ray Mask in LIGA Fabrication of Micro gear;
LIGA技术制造微齿轮中X光掩模板图形的CAD设计
3.
An investigation on MEMS has developed with high speed in the last years,and foundation of MEMS is microfabrication technology In accordance with imperfection of LIGA,A new UV-LIGA is presented in the paper We have manufactured the equipment for lithography of UV-LIGA The design pionts,solved key unit techniques in research,the results of experimentation are reviewe
针对电铸 (LIGA)技术所存在的缺点提出了紫外光电铸(UV -LIGA)技术 ,并研制了用于UV -LIGA技术的光刻设备。
补充资料：[3-(aminosulfonyl)-4-chloro-N-(2.3-dihydro-2-methyl-1H-indol-1-yl)benzamide]
分子式：C16H16ClN3O3S
分子量：365.5
CAS号：26807-65-8
性质：暂无
制备方法：暂无
用途：用于轻、中度原发性高血压。
分子量：365.5
CAS号：26807-65-8
性质：暂无
制备方法：暂无
用途：用于轻、中度原发性高血压。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条