The method for the silicon micro-gyroscope modeling and the co-simulation of the gyroscope structure with its interface circuit were researched in order to evaluate the interface circuit of the micro-gyroscope.

Based on the measurement character of the silicon micro-machined gyroscope, an AR(2) model is built after the measurement signal is first order divided.

Digital amplitude demodulation for micro gyroscope with levitated rotor based on DSP;

Design of capacitance structure of micro gyroscope with electromagnetically levitated rotor;

This detection circuit could direct output digital signal,has a inherent self-test feature and could prevent the latch up of the micro gyroscope.

Eigenfrequency analysis and structure optimization of micro gyroscope;

Digital Image Correlation and High-speed Imaging Methods for Dynamic Micro-gyroscope Characterization Measurement;

Magnetic suspension system of the design could avoid friction problems caused by mechanical bearing and localization that are key issues in other kind of micro-gyroscopes,so as to achieve high precision as ordinary gyroscopes.

Along with the development of the modern physics, micro-electronics, computer and inertial technology, the micro-mechanical micro-gyroscope with its unique characteristics has become a development trend for inertial sensor and it possesses a good application prospect .

Design of drive circuit for rotation of micromachined gyroscope with magnetic-suspension rotor;

MGELR is hopeful to obtain micromachined gyroscope with high precision.

The micromachined gyroscope with an electromagnetic levitated rotor (MGELR) was modeled and analyzed using finite element, and the influence of loop number, depth and inner diameter of levitation coil on levitating force was obtained.