1.
Study on the Process and Mechanism of Excimer Laser Micro-Machining;

准分子激光微细加工工艺和加工机理研究
2.
electron and ion beam microfabrication

电子束与离子束微细加工
3.
State Key Laboratory of optical technologies on microfabrication

微细加工光学技术国家重点实验室
4.
Study on Laser Assisted Microprocessing for Fabrication of Monolithic OEICs;

单片OEICs的激光微细加工技术研究
5.
Preparation of BST Thin Films and Their Fine-Patterning;

钛酸锶钡铁电薄膜的制备及微细加工
6.
Preparation of SiO_2-based Waveguide Films and Their Fine-patterning;

二氧化硅基光导膜的制备及微细加工
7.
Research on micro electrical discharge machining system and technics

微细电火花加工装置及加工工艺的研究
8.
Research on Processing Law of Micro Wire Electrical Discharging Machining;

微细电火花线切割加工工艺规律研究
9.
The Research on the Electrochemical Micromachining(ECMM) with Nanosecond-Pulse Generator

纳秒脉冲微细电化学加工的工艺研究
10.
Research of the Micro-EDM Equipment and Mill Machining Technology

微细电火花加工装置及铣削加工技术的研究
11.
Research on Microemulision Mixed EDM Finish Machining

微细液态添加剂电火花光整加工工艺研究
12.
Study of the Influence of Reaction Force on Micro Hole Drilling by Micro-EDM

加工力对微细孔电火花加工的影响研究
13.
Design of a Micro-hole EDM Tool and its Machining Experiments

微细孔电火花加工设备及其加工实验研究
14.
Advanced Drilling Technology of Micro-Via in PCB

印制电路板超细微钻孔先进加工技术
15.
The Investigation on the Electrochemical Micromachining (ECMM) with Nanosecond-Pulse Current;
纳秒脉冲电流微细电解加工技术研究
16.
Studies on Theories and Experiment in Femtosecond Laser Micromachining;

飞秒激光微精细加工理论与实验研究
17.
Research on Control System for Micro-EDM Machining Tool;

微细电火花加工机床控制系统的研究
18.
Research and Development on Feeding Set-up Used in Micro Electrochemical Machining with Ultra-pure Water;
超纯水微细电解加工送进装置的研制