1.
Structure and Properties of AlN and Fe-doped AlN Films;
AlN和Fe掺杂AlN薄膜的结构与性质
2.
Properties of Aluminum Nitride Thin Films Grown by Radio Frequency Magnetron Sputtering Using AlN Target
AlN靶材射频磁控溅射制备AlN薄膜及性质研究
3.
Research on Vapor Deposition and Control of Preferential Orientation of AlN Thin Films;
AlN薄膜的气相沉积及取向控制研究
4.
The Study of Structure and Properties of ZAO(ZnO:Al) and AlN Thin Films;
ZAO（ZnO:Al）与AlN薄膜的结构与特性的研究
5.
Research of Structure and Properties of ZnO and AlN Thin Films;
ZnO和AlN薄膜结构及其性能的研究
6.
Study of AlN Thin Films Deposited by Pulsed Laser Deposition;
脉冲激光沉积制备AlN薄膜的研究
7.
Study of AlN Thin Films Deposited on Mo Electrode by Reactive Magnetron Sputtering
Mo电极上磁控反应溅射AlN薄膜
8.
Monte-carlo Simulation of Magnetron Sputtering of AlN Thin Tilms
磁控溅射制备AlN薄膜的蒙特卡罗模拟
9.
Research on preparation of AlN thin films preferentially orientated to c-axis
c轴择优取向AlN薄膜的制备研究
10.
Preparation of Transparent (002) Preferential Orientation AlN Thin Film by Arc Ion Plating
电弧离子镀制备透明(002)AlN薄膜
11.
Analysis and Deposition of AlN Films for High Frequency Multilayered SAW Devices;
适用于多层膜高频SAW器件的AlN薄膜制备与表征
12.
Use a Theoretical Model to Investigate Reactive Sputtering of AIN Thin Films
应用模型研究反应溅射制备AlN薄膜过程(英文)
13.
Study on Bulk Acoustic Wave Ladder Filter Using AlN Thin Film
AlN薄膜体声波梯形滤波器的制备与性能分析
14.
Study on the Optical Properties of Ultrathin Al Films and AlN Thin Films and Related Problems;
超薄Al膜和AlN薄膜的光学性质及相关问题的研究
15.
Effect of technical parameters on AlN thin films deposited
沉积工艺参数对AlN薄膜择优取向影响的实验研究
16.
Fabrication and Characteristic Analysis of Bulk Wave Mass Sensor Based on Inclined AlN Film
基于倾斜AlN薄膜的体声波质量传感器的制备及性能分析
17.
Preparation of AlN Piezoelectric Thin Films and a Hinged Micromachined Piezoresistive High-g Accelerometer;
AlN压电薄膜制备及铰链式高量程加速度计研究
18.
Dielectric Films of TiO_2 and AlN by Pulsed Bias Arc Ion Plating;
脉冲偏压电弧离子镀沉积TiO_2与AlN介电薄膜