1.
Study of ZnO Thin Film Piezoelectric Micro Force Sensor/Actuator;
ZnO薄膜压电微力传感器/执行器研究
2.
The Research of PT/PZT/PT Micro-force Sensor;
PT/PZT/PT薄膜微力传感器的研究
3.
Research on Micro-Force Sensor Based on Parallel Micro-manipulator;
基于并联微动台的微力传感器系统研究
4.
Design of Micro-force Sensor System and Study on Its Application on the Atomic Force Microscopy;
微力传感器系统设计及在AFM中的应用研究
5.
RESEARCH ON MINIATURE FIVE DOF FINGERTIP FORCE/TORQUE SENSOR
微型五维指尖力/力矩传感器的研究
6.
Structural Analysis of Micromachined Piezoresistive Pressure Sensors for Dynamic Pressure Measurements
面向动态压力测量的微型压力传感器敏感结构
7.
A Study on the Design and Fabrication of Micro Pressure Sensors;
微压力传感器的设计与制作工艺研究
8.
Study on MEMS Piezo-resistance 3-D Micro-tactile Force Sensor
MEMS压阻式三维微触觉力传感器的研究
9.
Diaphragm based miniature fiber optic pressure sensor with F-P cavity
膜片式微型F-P腔光纤压力传感器
10.
Micromachining of Membrane and Cavity in Micro Pressure Sensors
微型压力传感器薄膜凹槽的制造技术
11.
Silicon Micro-pressure sensor based on Meso-piezoresistance
介观压阻型硅微压力传感器仿真分析
12.
Design and Experimentation of a Micro-gripper with Force Sensing
一种带力传感的微夹持器设计及试验
13.
A Study on Factors Affecting Miniaturization of Piezoresistive Pressure Sensors
压阻式微型压力传感器微型化限制因素的研究
14.
Coupled Electro-thermal-mechanical Analysis and Test of Micro Gas Pressure Sensor with Micro-hotplate;
微热板式微气压传感器电热力耦合分析及测试
15.
RESEARCH OF MICRO-SPRINGS FORCE SENSOR FOR MICRO-TENSILE SYSTEM
微拉伸系统中微弹簧力学传感器的研究
16.
Simulations of piezoresistive microcantilever sensors for surface stress measurements
表面应力敏感型压阻微悬臂梁传感器的模拟
17.
A Microgripper Integrated 3-D MEMS Force Sensor;
一种集成3-D MEMS力传感器的微夹持器的研究
18.
Analysis and Research on Mechanical Properties of Micro Pressure Sensor Chip;
微型压力传感器芯片的力学性能分析与研究