1.
On-Line Examination Method of Bonding Strength Measurement in Silicon MEMS Devices
硅MEMS器件键合强度在线检测方法
2.
A Method of Estimating the Silicon MEMS Gyro's Drift Base on Multi-scale and Multi-parameter
基于多尺度多参量的硅MEMS陀螺仪漂移预测
3.
Study on Basic Characteristics and Thermal Isolation Properties of Porous Silicon Used in MEMS;
MEMS中多孔硅基本特性及绝热性能研究
4.
Study on Technique of Wet Etching for 3D Structure of MEMS on the Silicon Substrate;
硅基MEMS三维结构湿法腐蚀技术研究
5.
Research of MEMS Bionic Vector Hydrophone Based on Silicon;
硅微MEMS仿生矢量水声传感器研究
6.
Protection of Chips in the Bulk-Si Etching in the MEMS Post-Processing;
MEMS后处理中体硅腐蚀的芯片保护
7.
Study of Silicon MEMS Based Two Dimensions Biomedical Microprobe Array;
硅基MEMS二维生物微探针阵列技术研究
8.
Research on Silicon-based MEMS Phase Shifters in RF Receive and Transmit Module Applications;
射频收发模块中的 硅基MEMS移相器研究
9.
Study on Porous Silicon Based Thermal Sensor in MEMS Technology;
面向MEMS的多孔硅基温度传感器研究
10.
Study on Electrical and Optical Properties of Porous Silicon in MEMS
MEMS中多孔硅的电学与光学特性研究
11.
Design of Polysilicon Nano-Film MEMS Pressure Sensor Structure
多晶硅纳米薄膜MEMS力敏结构研究
12.
A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology
一种基于MEMS微硅多狭缝分光光度计
13.
Tapered slot antenna on micromachined silicon substrate
硅基MEMS渐变式缝隙天线(英文)
14.
Research on Fabrication of Silicon Micro-cantilevers based on MEMS Technology
基于MEMS技术硅微悬臂梁制作工艺研究
15.
Study on the silicon-nitride film in MEMS switches
MEMS开关中氮化硅薄膜工艺研究
16.
Silicon Nanowires Fabricated by MEMS Technology and Its Properties Characterization;
基于MEMS技术制作的硅纳米线及其性质研究
17.
Research on Wet Anisotropic Etching of Silicon in MEMS;
MEMS中单晶硅的湿法异向腐蚀特性的研究
18.
Study on Capacitive MEMS Accelerometer Fabricated by Four Layers Si-Si Bonding;
硅四层键合MEMS电容式加速度传感器研究