1.
Pass-Band Sensitivity Analysis of MEMS Resonators/Filters for Telecommunication
电讯系统中硅微机械谐振器/滤波器通带灵敏度分析
2.
Mechanical Performance Analysis and Experiment Research on Laterally Driven Electrostatic Comb Silicon Micro Resonators;
横向梳状硅微静电谐振器机械性能分析与实验研究
3.
Performance of Micro One-sided Straight-leg Beam Resonator and Cascade V-Shape Thermal Actuator;
硅微单侧直脚谐振器与复合V型梁热致动器的机械性能研究
4.
The Structural Research of Micromichined Gyroscope Based on Nonresonace Principle;
基于非谐振原理的硅微机械陀螺仪的结构设计研究
5.
Analysis and Simulation of the Dynamic of the Double-Ended Tuning Fork Micro-Resonators
微机械音叉谐振器动力学分析与仿真
6.
Mechanical properties of MEMS film resonator analyzed by equivalent model
等效模型分析微机械薄膜谐振器的力学特性
7.
Design of RF MEMS resonator components based on cavity structure
基于腔结构的射频微机械谐振元件的设计
8.
Micromechanical Resonant Cantilever Sensors for Bio/chemical Detection;
生化检测用集成微机械悬臂梁谐振传感器技术
9.
Detection Circuit Design for Resonant Micro-machined Pressure Sensor
谐振式微机械压力传感器检测电路研究
10.
Parameterization Design of the Duble-ended Tuning Fork Micro-resinators
参数化方法在微机械谐振器设计中的应用
11.
Research of a Novel Micromachined Resonant Pressure Sensor
一种新型微机械谐振式压力传感器研究
12.
ROBUST DESIGN TO CONTROL FABRICATION VARIATIONS OF MEMS RESONATOR
考虑微加工误差的微机械谐振器/滤波器结构鲁棒设计
13.
Structure design and simulation of micromechanical silicon oscillating accelerometer
硅微谐振式加速度计结构设计与仿真
14.
Bandpass Analysis and Robust Structure Design for MEMS Resonators/Filters;
微机械谐振器/滤波器通带特性分析及结构鲁棒设计
15.
Study on MEMS Optical Switch Based on Vertical Torsional Micromirror;
转动竖直微镜的硅微机械光开关研究
16.
Micro phenomena measurement to silicon resonant microsensor are resented in this paper.
主要论述硅谐振微传感器中微现象测量。
17.
Application of MATLAB in Mechanical Resonance of Stabilized Platform
MATLAB在稳定平台机械谐振中的应用
18.
Analysis of the Resonant Frequency of Capacitive Micro-Machined Ultrasonic Transducer(cMUT) with Finite Element Method
硅微电容式超声换能器谐振频率的有限元分析