1.
Study on MEMS Based Planar Micromotor
基于微机械工艺的平面微电机的研究
2.
Study on Mems Technology Based Electro-Magnetic Planar Micromotor;
基于微机械工艺的电磁型平面微电机的研究
3.
PACKAGING OF WAVEGUIDE DEVICES BASED ON BULK SILICON MEMS TECHNOLOGY
基于体硅微机械工艺的光波导器件封装技术
4.
A High Performance Accelerometer with a Newly Developed Silicon Bulk Micromachining Technology;
新型体微机械工艺制造高性能加速度传感器的研究
5.
NEW MEMS MANUFACTURING TECHNOLOGIES
微电子机械系统的新制造工艺技术(英文)
6.
Technology of Shape Memory Alloy Thin Films for MEMS
用于微机械的形状记忆合金薄膜工艺研究
7.
Design and Process of a Novel RF MEMS Latching Switch;
新型锁存射频微机械开关的设计与工艺研究
8.
The Structural Design and Technological Study of an Electromagnetic Micromachined Gyroscope;
电磁式微机械陀螺结构设计与工艺研究
9.
Some Microelectromechanical Systems and Related LIGA Techniques
若干微电子机械系统研制及相关LIGA工艺研究
10.
Investigation on Procession and Properties of Carbon Microspheres by Ball Milling
机械球磨制备碳微球的工艺及相关性能研究
11.
Design and Fabrication of a Bulk Micromachined Vibratory Tunneling Gyroscope
新型微机械隧道陀螺仪的设计和工艺制备
12.
Manufacturing Technique for Hydraulic Machinery
水力机械制造工艺学
13.
Modern Theory of Mechanical Manufacturing Process ?
现代机械制造工艺理论
14.
Design and Fabricate Process of a Three-frame MEMS Gyroscope;
三框架硅微机械陀螺的结构设计及加工工艺研究
15.
tivated micromachining
电子束显微机械加工
16.
micro-mechanized engineering data
微型机械化工程数据
17.
Application of computing technique and microelectronics in textile machinery and technology of textile production.
在纺织机械和纺织生产工艺中应用电脑技术和微电子装置的问题
18.
On Process and Microstructure of Fe-Al and Fe-Si-Al Alloy Prepared by Mechanical Alloying;
机械合金化制备Fe-Al和Fe-Si-Al合金的工艺和微观结构研究