1.
Study on MEMS Optical Switch Based on Vertical Torsional Micromirror;
转动竖直微镜的硅微机械光开关研究
2.
PACKAGING OF WAVEGUIDE DEVICES BASED ON BULK SILICON MEMS TECHNOLOGY
基于体硅微机械工艺的光波导器件封装技术
3.
ROBUST STRUCTURE DESIGN FOR MEMS FILTRERS IN TELECOMMUNICATION
电信系统中的硅微机械滤波器结构鲁棒设计
4.
Research on Design and Read-out Technology of Comb Silicon Micro-mechanical Accelerometer;
叉指式硅微机械加速度计设计与检测技术研究
5.
Research on Factors of Zero Position Offset in Silicon Mechanical Micro-accelerometer;
硅微机械加速度计零位偏移的影响因素研究
6.
Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit
一种闭环自激式驱动的硅微机械电场传感器
7.
Non-linearity Compensation Algorithm and Realization for the Output Signal of Silicon Micromachined Gyroscope
硅微机械陀螺信号非线性补偿算法及实现
8.
Research and Test on Silicon Micro-Gyroscope Temperature Characteristics
硅微机械陀螺表头温度特性研究与测试
9.
Structure and dynamic characteristics of silicon condenser micromachined microphone
电容式硅微机械麦克风的结构与动态特性
10.
Research on Analog Signal Detecting of Silicon Micro-Machined Gyroscope
硅微机械陀螺仪模拟信号检测技术研究
11.
Errors Analysis of Silicon Micro-machined Gyroscope Driven by Rotating Carrier
旋转载体驱动的硅微机械陀螺误差研究
12.
Temperature Compensation of MEMS Accelerometer in Attitude Heading Reference Systemm
姿态参照系统中硅微机械加速度计的温度补偿
13.
Pass-Band Sensitivity Analysis of MEMS Resonators/Filters for Telecommunication
电讯系统中硅微机械谐振器/滤波器通带灵敏度分析
14.
High-performance MEMS RF Passive Components and Silicon Micromachined Technology;
高性能MEMS射频无源器件与三维硅微机械加工技术
15.
Design, Fabrication and Dynamic Testing of Novel Si-Based MEMS Torsion-Mirror Optical Actuators;
硅微机械扭转镜光致动器及其动态测试技术的研究
16.
The Structural Research of Micromichined Gyroscope Based on Nonresonace Principle;
基于非谐振原理的硅微机械陀螺仪的结构设计研究
17.
The Research on the Structure Design and Close-Loop Driving Circuit of Differential Micromechanical Silicon Gyroscope;
差分式硅微机械陀螺的结构设计及闭环驱动研究
18.
Design and Fabrication of a Novel MEMS Silicon Spring
一种新型微机械硅弹簧的设计与制作