1.
Study on CMP Slurry of ULSI Copper Interconnection Layer;
ULSI铜互连层CMP抛光液研究
2.
Studies on Microstructure and Stress of Copper Interconnects in ULSI;
ULSI铜互连线微观结构和应力研究
3.
Microstructure and Stress of ULSI Cu Interconnects and Their Impacts on Electromigration;
ULSI铜互连线微结构与应力及其对电徙动影响的研究
4.
Study on the Removal Rate of CMP for Tungsten Plug in ULSI
ULSI多层互连中W-CMP速率研究
5.
Mechanical Characterization for Low-k Film of ULSI Interconnects by LSAWs;
LSAWs技术表征ULSI互连布线Low-k介质薄膜机械特性的研究
6.
Algorithm Research on Measuring the Young's Module for Low-K Film of ULSI Interconnects by Lsaws
LSAWs技术检测ULSI互连布线low-k介质薄膜杨氏模量的算法研究
7.
A Novel Intergrated Circuit Cu Interconnect Process Research;
一种新型集成电路铜互连方法的研究
8.
Thermo-Elastic Analysis of Air-Gap Copper Interconnects;
Air-gap铜互连结构的热应力分析
9.
Lifetime Modeling and Characteristics of TDDB in VLSI Copper Interconnection
VLSI铜互连可靠性TDDB特性及其寿命评估模型研究
10.
The Evaluation on Electromigration Reliability of Copper Interconnect Structures with Extension
具有冗余设计的铜互连线电迁移可靠性评估
11.
Quantitative analysis on median-time-to-fail of copper interconnect with lose object defects
有丢失物缺陷的铜互连线中位寿命的定量研究
12.
Ti-Al Film Used as Diffusion Barrier for Copper Interconnection Deposited by RF Magnetron Sputtering
磁控溅射法制备用作铜互连阻挡层的钛-铝薄膜
13.
open system interconnection (OSI)
开放式系统互连;开放系统互连;开放型系统互连
14.
continuously pulsed copper halide laser
连续脉冲卤化铜激光器
15.
Characteristics of sandstone copper ores in Tianlu copper deposit
北祁连天鹿铜矿床砂岩型铜矿石特征
16.
a series of interconnected caves
一连串相互连接的洞
17.
interconnection and connection in electronic equipment
电子设备互连与连接
18.
ECMP of Cu in the Preparation Process of ULSI
ULSI制造中Cu的电化学机械抛光