1.
It gives an exposition of the thermally excited silicon resonator pressure sensor and the thermally excited resonating membrane mass flow sensor.
评价性地论述了热激励硅谐振压力传感器和热激励谐振膜质量流量传感器。
2.
Design and Fabrication of Thermally Excited Si_3N_4 Resonant Beam Pressure Sensor;

热激励氮化硅谐振梁压力传感器的设计与制作
3.
Model and Elimination for Co-Channel Interference in Diffused Silicon Resonant Pressure Sensor
扩散硅谐振式压力传感器同频干扰的建模与消除
4.
Research on Structure of Passive Wireless Resonant SAW Pressure Sensor;

谐振型无源无线SAW压力传感器结构研究
5.
Detection Circuit Design for Resonant Micro-machined Pressure Sensor

谐振式微机械压力传感器检测电路研究
6.
Research of a Novel Micromachined Resonant Pressure Sensor

一种新型微机械谐振式压力传感器研究
7.
Modeling of Resonant Piezoelectric Ice Sensor;

压电谐振式结冰传感器数学模型研究
8.
Micro phenomena measurement to silicon resonant microsensor are resented in this paper.

主要论述硅谐振微传感器中微现象测量。
9.
Silicon Micro-pressure sensor based on Meso-piezoresistance

介观压阻型硅微压力传感器仿真分析
10.
CAD of Layout of Silicon Pressure Sensor

硅压力传感器版图的计算机辅助设计
11.
Research on Process of Polysilicon Nanofilm Pressure Sensor

多晶硅纳米薄膜压力传感器工艺研究
12.
Studies on the Characteristics of Electrical-Thermally Excited Resonant Micro-beam Pressure Sensor and Development of the Portable Piezometer;
电热激励揩振式硅微梁压力传感器特性研究及便携式压力测试仪的研制
13.
vibrating silicon crystal transducer

石英晶体谐振式传感器
14.
Analysis of Mounted Resonant Frequency of Piezo-electricAcceleration Sensor and Its Application;
压电加速度传感器安装谐振频率分析及应用
15.
Research on Analysis Model of Silicon X_piezoresistive Pressure Sensors;

X型硅压阻式压力传感器的解析模型研究
16.
Development on the Pneumatic-Electric Transducer Based on the Silicon Pressure Sensor;

基于扩散硅压力传感器的气电转换器的研制
17.
A Few Key Technological Measures for Increasing the Quality of Diffused-Silicon Sensors

提高扩散硅压力传感器质量的几项措施
18.
Study on Modeling and Compensation for Hysteresis of Diffused Silicon Pressure Sensor;

扩散硅压力传感器迟滞建模与补偿研究