1.
Fabrication of P-type Amorphous Silicon Thin Films and Poly-Silicom by PECVD;
PECVD法制备P型非晶硅薄膜及多晶硅薄膜
2.
Preparation of Poly-Silicon Thin Film in Low Temperature Using SiH_4 as Gas Source by ECR-PECVD;
以硅烷为气源用ECR-PECVD制备多晶硅薄膜
3.
The Effect of Crystallization Ratio on Dark Conductivity of Poly-Silicon Thin Films;
多晶硅薄膜晶化率对暗电导率的影响
4.
Structure Analysis of Polycrystalline Silicon Films Prepared by ECR-PECVD at Low Temperature;
多晶硅薄膜ECR-PECVD低温生长结构研究
5.
Growth of Polycrystalline Silicon Thin Films on Flexible Substrate;
在柔性衬底上制备多晶硅薄膜的研究
6.
Low-temperature Deposition of Poly-silicon Thin Films by ECR-PECVD and Its Characteristic Analysis;
多晶硅薄膜的ECR-PECVD低温沉积及特性
7.
Preparation of Polycrystalline Silicon Film on Upgraded Metallurgical Silicon Substrate by ECR-PECVD;
在升级冶金级硅衬底上用ECR-PECVD沉积多晶硅薄膜
8.
Studies on Preparing Poly-Si Thin Film on Ssp Substrate at Low-temperature;
以硅带为衬底低温制备多晶硅薄膜的研究
9.
A Research on Driving Module of Poly-Si TFT OLED;
多晶硅薄膜晶体管有机发光显示模块的研制
10.
Studies on Grain-boundary States in Polysilicon Films FET;
多晶硅薄膜场效应结构的晶粒间界能态分布
11.
Study and Simulation on Reliability of Poly-Si Thin Film Transistor;
多晶硅薄膜晶体管可靠性研究及其模拟
12.
Modeling of the Band-to-Band Tunneling Current in Polysilicon TFT's Leakage Region
多晶硅薄膜晶体管泄漏区带间隧穿电流的建模
13.
Low-temperature Deposition of Poly-silicon Thin Films by Hot-wire CVD and the Analysis on Characteristics;
热丝法低温制备多晶硅薄膜及其特性分析
14.
Probe Diagnosis of Electron Space Characteristics in SiCl_4/H_2 Plasma during Polycrystalline Silicon Film Deposition;
SiCl_4/H_2沉积多晶硅薄膜过程中电子空间特性检测
15.
Influence of Metal Underlayers on Low-temperature Deposition of Poly-silicon Thin Films by Hot-wire CVD;
过渡层对热丝法低温制备多晶硅薄膜的影响
16.
Deposition and Characteristics of Poly-silicon Films by Hot-wire CVD;
热丝化学气相沉积制备多晶硅薄膜的研究
17.
Study on the Polycrystalline Silicon Thin Film Solar Cells on Ceramics;
陶瓷衬底上多晶硅薄膜太阳电池的研究
18.
Preparation of Poly-silicon Thin Film in Low Temperature Using SiCl_4 as Gas Source by PECVD;
以SiCl_4为气源用PECVD方法低温沉积多晶硅薄膜